Researcher Dry Etch for 2D and 1D materials

Researcher Dry Etch for 2D and 1D materials Background Low dimensionality materials, like transition metal dichalcogenides (TMDCs, 2D) or single-walled carbon nanotubes (SWCNTs, 1D) are driving attention in view of their superior transport properties, which can find applications, amongst others, for advanced CMOS and DNA sensing.

The VLSI manufacturing of devices based on TMDCs or SWCNTs requires to engineer new processing methods, specific to these materials.

In particular, new low damage meta…